Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004649 | Immersion photolithography system and method using microchannel nozzles | Herman Vogel, Klaus Simon | 2011-08-23 |
| 7982850 | Immersion lithographic apparatus and device manufacturing method with gas supply | Joeri Lof, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra, Theodorus Marinus Modderman +7 more | 2011-07-19 |
| 7936444 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Christiaan Alexander Hoogendam +11 more | 2011-05-03 |
| 7936447 | Lithographic apparatus and device manufacturing method | Erik Marie Jose Smeets, David Christopher Ockwell, Henricus Jozef Peter Lenders | 2011-05-03 |
| 7932999 | Lithographic apparatus and device manufacturing method | Christiaan Alexander Hoogendam, Sjoerd Nicolaas Lambertus Donders, Joeri Lof, Erik Roelof Loopstra, Johannes Catharinus Hubertus Mulkens +4 more | 2011-04-26 |