Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8011915 | Imprint lithography | — | 2011-09-06 |
| 8004649 | Immersion photolithography system and method using microchannel nozzles | Herman Vogel, Antonius Theodorus Anna Maria Derksen | 2011-08-23 |
| 7982850 | Immersion lithographic apparatus and device manufacturing method with gas supply | Joeri Lof, Antonius Theodorus Anna Maria Derksen, Christiaan Alexander Hoogendam, Aleksey Yurievich Kolesnychenko, Erik Roelof Loopstra +7 more | 2011-07-19 |
| 7936444 | Lithographic apparatus and device manufacturing method | Bob Streefkerk, Johannes Jacobus Matheus Baselmans, Henrikus Herman Marie Cox, Antonius Theodorus Anna Maria Derksen, Sjoerd Nicolaas Lambertus Donders +11 more | 2011-05-03 |
| 7878791 | Imprint lithography | Karel Diederick Van Der Mast, Johan Frederik Dijksman | 2011-02-01 |