Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7961309 | Metrology tool, system comprising a lithographic apparatus and a metrology tool, and a method for determining a parameter of a substrate | Reinder Teun Plug, Arie Jeffrey Den Boef | 2011-06-14 |
| 7878791 | Imprint lithography | Klaus Simon, Johan Frederik Dijksman | 2011-02-01 |