Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8031325 | Lithographic apparatus and device manufacturing method | Nicolaas Rudolf Kemper, Henrikus Herman Marie Cox, Sjoerd Nicolaas Lambertus Donders, Roelof Frederik De Graaf, Christiaan Alexander Hoogendam +8 more | 2011-10-04 |
| 8004649 | Immersion photolithography system and method using microchannel nozzles | Klaus Simon, Antonius Theodorus Anna Maria Derksen | 2011-08-23 |
| 7924399 | Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods | Ronald Van Der Ham, Tjarko Adriaan Rudolf Van Empel, Niek Jacobus Johannes Roset | 2011-04-12 |