Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072575 | Lithographic apparatus with temperature sensor and device manufacturing method | Paulus Bartholomeus Johannes Schaareman | 2011-12-06 |
| 7978339 | Lithographic apparatus temperature compensation | Marcel Hendrikus Maria Beems, Emiel Jozef Melanie Eussen | 2011-07-12 |
| 7924399 | Assembly comprising a conditioning system and at least one object, a conditioning system, a lithographic apparatus and methods | Ronald Van Der Ham, Herman Vogel, Niek Jacobus Johannes Roset | 2011-04-12 |