Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999912 | Lithographic apparatus and sensor calibration method | Engelbertus Antonius Fransiscus Van Der Pasch, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens +2 more | 2011-08-16 |
| 7978339 | Lithographic apparatus temperature compensation | Tjarko Adriaan Rudolf Van Empel, Marcel Hendrikus Maria Beems | 2011-07-12 |