Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999912 | Lithographic apparatus and sensor calibration method | Engelbertus Antonius Fransiscus Van Der Pasch, Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Ruud Antonius Catharina Maria Beerens +2 more | 2011-08-16 |
| 7978307 | Gas bearing, and lithographic apparatus provided with such a bearing | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Johannes Adrianus Antonius Theodorus Dams | 2011-07-12 |