Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077287 | Method of preparing components, prepared component, lithographic apparatus and device manufacturing method | Mark Kroon, Harm-Jan Voorma, Carolus Ida Maria Antonius Spee | 2011-12-13 |
| 7978307 | Gas bearing, and lithographic apparatus provided with such a bearing | Bastiaan Lambertus Wilhelmus Marinus Van De Ven, Jacob Willem Vink | 2011-07-12 |