Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8077287 | Method of preparing components, prepared component, lithographic apparatus and device manufacturing method | Johannes Adrianus Antonius Theodorus Dams, Mark Kroon, Carolus Ida Maria Antonius Spee | 2011-12-13 |
| 7875863 | Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Mandeep Singh, Derk Jan Wilfred Klunder | 2011-01-25 |