Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE42338 | Capping layer for EUV optical elements | Hugo Matthieu Visser | 2011-05-10 |
| 7875863 | Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Harm-Jan Voorma, Derk Jan Wilfred Klunder | 2011-01-25 |