| 8075841 |
Biosensor with one-dimensional sub-diffraction-limited apertures composed of a grid and a polarizer |
Maarten Marinus Johannes Wilhelmus Van Herpen, Dirk Jan Broer, Emiel Peeters, Hendrik Roelof Stapert |
2011-12-13 |
| 8071963 |
Debris mitigation system and lithographic apparatus |
Maarten Marinus Johannes Wilhelmus Van Herpen, Wouter Anthon Soer, Kurt Gielissen |
2011-12-06 |
| 8039814 |
Luminescence sensor operating in reflection mode |
Maarten Marinus Johannes Wilhelmus Van Herpen, Hendrik Roelof Stapert |
2011-10-18 |
| 8039818 |
Sub wavelength aperture |
Maarten Marinus Johannes Wilhelmus Van Herpen |
2011-10-18 |
| 7947946 |
Optical system for mapping signal light onto a detector |
Marcello Leonardo Mario Balistreri, Maarten Marinus Johannes Wilhelmus Van Herpen |
2011-05-24 |
| 7875863 |
Illumination system, lithographic apparatus, mirror, method of removing contamination from a mirror and device manufacturing method |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Mandeep Singh, Harm-Jan Voorma |
2011-01-25 |
| 7863591 |
Radiation system and lithographic apparatus comprising the same |
Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Wouter Anthon Soer, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more |
2011-01-04 |
