Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8071963 | Debris mitigation system and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Derk Jan Wilfred Klunder, Kurt Gielissen | 2011-12-06 |
| 7952084 | Radiation source and lithographic apparatus | Maarten Marinus Johannes Wilhelmus Van Herpen, Martin Jacobus Johan Jak | 2011-05-31 |
| 7928412 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more | 2011-04-19 |
| 7863591 | Radiation system and lithographic apparatus comprising the same | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Derk Jan Wilfred Klunder, Johannes Christiaan Leonardus Franken, Olav Waldemar Vladimir Frijns +1 more | 2011-01-04 |