Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7928412 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Bastiaan Theodoor Wolschrijn +5 more | 2011-04-19 |
| 7897110 | System and method for detecting at least one contamination species in a lithographic apparatus | Vadim Yevgenyevich Banine, Levinus Pieter Bakker, Ralph Kurt, Johannes Hubertus Josephina Moors, Peter Cornelis Zalm | 2011-03-01 |