Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959310 | Optical arrangement and EUV lithography device with at least one heated optical element, operating methods, and methods for cleaning as well as for providing an optical element | Dirk Heinrich Ehm, Annemieke Van De Runstraat, Arnoldus Jan Storm, Thomas Stein, Marco G. H. Meijerink +8 more | 2011-06-14 |
| 7935218 | Optical apparatus, lithographic apparatus and device manufacturing method | Johannes Hubertus Josephina Moors, Vadim Yevgenyevich Banine, Carolus Ida Maria Antonius Spee, Rik Jansen | 2011-05-03 |
| 7928412 | Lithographic apparatus, and device manufacturing method | Maarten Marinus Johannes Wilhelmus Van Herpen, Vadim Yevgenyevich Banine, Johannes Peterus Henricus De Kuster, Johannes Hubertus Josephina Moors, Lucas Henricus Johannes Stevens +5 more | 2011-04-19 |