Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7999912 | Lithographic apparatus and sensor calibration method | Emiel Jozef Melanie Eussen, Stefan Gertrud Marie Hendriks, Erik Roelof Loopstra, Jacob Willem Vink, Ruud Antonius Catharina Maria Beerens +2 more | 2011-08-16 |
| 7903866 | Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object | Marc Wilhelmus Maria Van Der Wijst, Koen Jacobus Johannes Maria Zaal | 2011-03-08 |