Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059259 | Damping arrangement, active damping system, lithographic apparatus, and projection assembly | Hans Butler, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker | 2011-11-15 |
| 7999914 | Lithographic apparatus and device manufacturing method | Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra, Marius Ravensbergen | 2011-08-16 |
| 7903866 | Measurement system, lithographic apparatus and method for measuring a position dependent signal of a movable object | Engelbertus Antonius Fransiscus Van Der Pasch, Koen Jacobus Johannes Maria Zaal | 2011-03-08 |