Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059259 | Damping arrangement, active damping system, lithographic apparatus, and projection assembly | Marc Wilhelmus Maria Van Der Wijst, Joost De Pee, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker | 2011-11-15 |
| 8044373 | Lithographic apparatus and device manufacturing method | — | 2011-10-25 |
| 7936443 | Lithographic apparatus and device manufacturing method | Frank Auer | 2011-05-03 |