Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8059259 | Damping arrangement, active damping system, lithographic apparatus, and projection assembly | Hans Butler, Marc Wilhelmus Maria Van Der Wijst, Cornelius Adrianus Lambertus De Hoon, Stijn Boschker | 2011-11-15 |