Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8052289 | Mirror array for lithography | Heine Melle Mulder | 2011-11-08 |
| 7999914 | Lithographic apparatus and device manufacturing method | Marc Wilhelmus Maria Van Der Wijst, Dominicus Jacobus Petrus Adrianus Franken, Erik Roelof Loopstra | 2011-08-16 |