Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072575 | Lithographic apparatus with temperature sensor and device manufacturing method | Tjarko Adriaan Rudolf Van Empel | 2011-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072575 | Lithographic apparatus with temperature sensor and device manufacturing method | Tjarko Adriaan Rudolf Van Empel | 2011-12-06 |