Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8045134 | Lithographic apparatus, control system and device manufacturing method | Marcus Adrianus Van De Kerkhof, Johannes Henricus Wilhelmus Jacobs, Nicolas Lallemant | 2011-10-25 |
| 8013978 | Lithographic apparatus and device manufacturing method | Erik Roelof Loopstra, Laurens Anthony Sanderse | 2011-09-06 |
| 7924403 | Lithographic apparatus and device and device manufacturing method | Paulus Martinus Maria Liebregts, Johannes Henricus Wilhelmus Jacobs | 2011-04-12 |