Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8013978 | Lithographic apparatus and device manufacturing method | Tammo Uitterdijk, Erik Roelof Loopstra | 2011-09-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8013978 | Lithographic apparatus and device manufacturing method | Tammo Uitterdijk, Erik Roelof Loopstra | 2011-09-06 |