Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7969549 | Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method | Herman Boom, Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Peter Julian Pollard | 2011-06-28 |
| 7948606 | Moving beam with respect to diffractive optics in order to reduce interference patterns | Johannes Jacobus Matheus Baselmans, Pieter Willem Herman De Jager, Henri Johannes Petrus Vink | 2011-05-24 |