Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7969549 | Liquid filled lens element, lithographic apparatus comprising such an element and device manufacturing method | Borgert Kruizinga, Martinus Hendrikus Antonius Leenders, Johannes Catharinus Hubertus Mulkens, Huibert Visser, Peter Julian Pollard | 2011-06-28 |