Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8054449 | Enhancing the image contrast of a high resolution exposure tool | — | 2011-11-08 |
| 8045135 | Lithographic apparatus with a fluid combining unit and related device manufacturing method | Johannes Catharinus Hubertus Mulkens, Matthew Lipson, Louis John Markoya | 2011-10-25 |
| 7995185 | Systems and methods for thermally-induced aberration correction in immersion lithography | Louis John Markoya, Diane McCafferty | 2011-08-09 |
| 7897058 | Device manufacturing method and computer program product | Richard Johannes Franciscus Van Haren, Maurits Van Der Schaar, Ewoud Vreugdenhil | 2011-03-01 |
| 7898643 | Immersion photolithography system and method using inverted wafer-projection optics interface | — | 2011-03-01 |
| 7882780 | System and method for patterning both sides of a substrate utilizing imprint lithography | — | 2011-02-08 |