Issued Patents 2011
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8072615 | Alignment method, alignment system, and product with alignment mark | Sami Musa, Sanjaysingh Lalbahadoersing, Xiuhong Wei | 2011-12-06 |
| 8029953 | Lithographic apparatus and device manufacturing method with double exposure overlay control | Maurits Van Der Schaar | 2011-10-04 |
| 7989303 | Method of creating an alignment mark on a substrate and substrate | — | 2011-08-02 |
| 7944063 | Application of 2-dimensional photonic crystals in alignment devices | Sami Musa | 2011-05-17 |
| 7916276 | Lithographic apparatus and device manufacturing method with double exposure overlay control | Maurits Van Der Schaar | 2011-03-29 |
| 7897058 | Device manufacturing method and computer program product | Maurits Van Der Schaar, Ewoud Vreugdenhil, Harry Sewell | 2011-03-01 |
| 7880880 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Jacobus Burghoorn, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2011-02-01 |
| 7879682 | Marker structure and method for controlling alignment of layers of a multi-layered substrate | Arie Jeffrey Den Boef, Jacobus Burghoorn, Maurits Van Der Schaar, Bart Rijpers | 2011-02-01 |
| 7863763 | Binary sinusoidal sub-wavelength gratings as alignment marks | Sami Musa | 2011-01-04 |