Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7879682 | Marker structure and method for controlling alignment of layers of a multi-layered substrate | Richard Johannes Franciscus Van Haren, Arie Jeffrey Den Boef, Maurits Van Der Schaar, Bart Rijpers | 2011-02-01 |
| 7880880 | Alignment systems and methods for lithographic systems | Franciscus Bernardus Maria Van Bilsen, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2011-02-01 |