Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8018594 | Lithographic apparatus with multiple alignment arrangements and alignment measuring method | — | 2011-09-13 |
| 7894063 | Lithographic method | Everhardus Cornelis Mos | 2011-02-22 |
| 7880880 | Alignment systems and methods for lithographic systems | Jacobus Burghoorn, Richard Johannes Franciscus Van Haren, Paul Christiaan Hinnen, Hermanus Gerardus Van Horssen, Jeroen Huijbregtse +9 more | 2011-02-01 |