Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064056 | Substrate used in a method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij | 2011-11-22 |
| 7969577 | Inspection apparatus, an apparatus for projecting an image and a method of measuring a property of a substrate | Roy Werkman, Maurits Van Der Schaar | 2011-06-28 |
| 7898662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Stefan Carolus Jacobus Antonius Keij | 2011-03-01 |
| 7894063 | Lithographic method | Franciscus Bernardus Maria Van Bilsen | 2011-02-22 |