Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064056 | Substrate used in a method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Everhardus Cornelis Mos | 2011-11-22 |
| 7898662 | Method and apparatus for angular-resolved spectroscopic lithography characterization | Maurits Van Der Schaar, Arie Jeffrey Den Boef, Everhardus Cornelis Mos | 2011-03-01 |