Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8017310 | Lithographic method | Richard Franciscus Johannes Van Haren | 2011-09-13 |
| 7897058 | Device manufacturing method and computer program product | Richard Johannes Franciscus Van Haren, Maurits Van Der Schaar, Harry Sewell | 2011-03-01 |
| 7889316 | Method for patterning a radiation beam, patterning device for patterning a radiation beam | Wilhelmus Petrus De Boeij, Simon De Groot, Johannes Wilhelmus De Klerk | 2011-02-15 |