Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068210 | Lithographic apparatus, device manufacturing method and computer program product | — | 2011-11-29 |
| 7889316 | Method for patterning a radiation beam, patterning device for patterning a radiation beam | Wilhelmus Petrus De Boeij, Simon De Groot, Ewoud Vreugdenhil | 2011-02-15 |