Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Tilmann Heil, Damian Fiolka, Roel De Jonge | 2011-04-19 |
| 7889316 | Method for patterning a radiation beam, patterning device for patterning a radiation beam | Simon De Groot, Ewoud Vreugdenhil, Johannes Wilhelmus De Klerk | 2011-02-15 |