Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8027026 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2011-09-27 |
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Tilmann Heil, Damian Fiolka | 2011-04-19 |
| 7894040 | Lithographic apparatus and device manufacturing method | Matthew Lipson, Marcel Mathijs Theodore Marie Dierichs, Sjoerd Nicolaas Lambertus Donders, Johannes Catharinus Hubertus Mulkens, Bob Streefkerk +1 more | 2011-02-22 |