Issued Patents 2011
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8081293 | Illumination system of a microlithographic projection exposure apparatus | Nils Dieckmann | 2011-12-20 |
| 8077289 | Device and method for influencing the polarization distribution in an optical system | — | 2011-12-13 |
| 8068279 | Optical system of an illumination device of a projection exposure apparatus | Karl-Heinz Schuster, Juergen Hartmaier, Manfred Maul, Dieter Schmerek, Detlev Mueller +3 more | 2011-11-29 |
| 8040492 | Illumination system of a microlithographic projection exposure apparatus | — | 2011-10-18 |
| 8035803 | Subsystem of an illumination system of a microlithographic projection exposure apparatus | — | 2011-10-11 |
| 8031327 | Illumination system of a microlithographic projection exposure apparatus | — | 2011-10-04 |
| 8025427 | Filter device for the compensation of an asymmetric pupil illumination | Manfred Maul | 2011-09-27 |
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Manfred Maul, Vladimir Davydenko, Axel Scholz, Markus Deguenther, Johannes Wangler | 2011-08-23 |
| 7995280 | Projection exposure system, beam delivery system and method of generating a beam of light | Matthias Kuss, Gerd Reisinger, Manfred Maul, Vladimir Davydenko | 2011-08-09 |
| 7940375 | Transmission filter apparatus | Axel Scholz | 2011-05-10 |
| 7929116 | Polarized radiation in lithographic apparatus and device manufacturing method | Christian Wagner, Wilhelmus Petrus De Boeij, Tilmann Heil, Roel De Jonge | 2011-04-19 |
| 7916391 | Apparatus for providing a pattern of polarization | Michael Albert | 2011-03-29 |