Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068279 | Optical system of an illumination device of a projection exposure apparatus | Juergen Hartmaier, Manfred Maul, Dieter Schmerek, Detlev Mueller, Otto Hahnemann +3 more | 2011-11-29 |
| 8049973 | Projection objective and method for optimizing a system aperture stop of a projection objective | — | 2011-11-01 |
| 8023104 | Microlithographic projection exposure apparatus | — | 2011-09-20 |
| RE42570 | Catadioptric objective | — | 2011-07-26 |
| 7982969 | Projection objective of a microlithographic projection exposure apparatus | Heiko Feldmann, Toralf Gruner, Michael Totzeck, Wilfried Clauss, Susanne Beder +2 more | 2011-07-19 |
| 7977651 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Udo Dinger +2 more | 2011-07-12 |