Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7982854 | Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system | Hans-Juergen Mann, Wolfgang Singer, Olaf Dittmann, Michael Totzeck | 2011-07-19 |
| 7982969 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Heiko Feldmann, Michael Totzeck, Wilfried Clauss, Susanne Beder +2 more | 2011-07-19 |
| 7961297 | Method for determining intensity distribution in the image plane of a projection exposure arrangement | Joern Greif-Wuestenbecker, Beate Boehme, Ulrich Stroessner, Michael Totzeck, Vladimir Kamenov +3 more | 2011-06-14 |
| 7920275 | Optical system of a microlithographic projection exposure apparatus | Joerge Tschischgale | 2011-04-05 |