Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8031326 | Illumination system or projection lens of a microlithographic exposure system | Michael Totzeck, Susanne Beder, Heiko Feldmann, Daniel Kraehmer, Aurelian Dodoc | 2011-10-04 |
| 7982969 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Heiko Feldmann, Toralf Gruner, Michael Totzeck, Susanne Beder +2 more | 2011-07-19 |
| 7907347 | Optical composite material and method for its production | Eric Eva | 2011-03-15 |