Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068276 | Projection objective for lithography | Susanne Beder, Aurelian Dodoc, Alexander Epple, Hans-Juergen Rostalski | 2011-11-29 |
| 8031326 | Illumination system or projection lens of a microlithographic exposure system | Michael Totzeck, Susanne Beder, Wilfried Clauss, Daniel Kraehmer, Aurelian Dodoc | 2011-10-04 |
| 7982969 | Projection objective of a microlithographic projection exposure apparatus | Karl-Heinz Schuster, Toralf Gruner, Michael Totzeck, Wilfried Clauss, Susanne Beder +2 more | 2011-07-19 |
| 7965453 | Projection objective and projection exposure apparatus including the same | Wilhelm Ulrich, Aurelian Dodoc, Hans-Juergen Rostalski | 2011-06-21 |