Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068276 | Projection objective for lithography | Heiko Feldmann, Susanne Beder, Aurelian Dodoc, Alexander Epple | 2011-11-29 |
| 7969663 | Projection objective for immersion lithography | Aurelian Dodoc, Wilhelm Ulrich | 2011-06-28 |
| 7965453 | Projection objective and projection exposure apparatus including the same | Wilhelm Ulrich, Aurelian Dodoc, Heiko Feldmann | 2011-06-21 |