Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068276 | Projection objective for lithography | Heiko Feldmann, Susanne Beder, Aurelian Dodoc, Hans-Juergen Rostalski | 2011-11-29 |
| 8064040 | Projection objective, projection exposure apparatus and reflective reticle for microlithography | Aurelian Dodoc, Wilhelm Ulrich, Dieter Bader | 2011-11-22 |
| 8004756 | Chromatically corrected catadioptric objective and projection exposure apparatus including the same | — | 2011-08-23 |
| 7869122 | Catadioptric projection objective | David Shafer, Wilhelm Ulrich, Aurelian Dodoc, Rudolf Von Buenau, Hans-Juergen Mann | 2011-01-11 |