Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064040 | Projection objective, projection exposure apparatus and reflective reticle for microlithography | Aurelian Dodoc, Wilhelm Ulrich, Alexander Epple | 2011-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8064040 | Projection objective, projection exposure apparatus and reflective reticle for microlithography | Aurelian Dodoc, Wilhelm Ulrich, Alexander Epple | 2011-11-22 |