Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Vladimir Davydenko, Axel Scholz, Markus Deguenther | 2011-08-23 |
| 7977651 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Karl-Heinz Schuster, Udo Dinger +2 more | 2011-07-12 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Andre Bresan +6 more | 2011-02-01 |
| RE42065 | Illumination system particularly for microlithography | Martin Antoni, Wolfgang Singer | 2011-01-25 |