Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8068279 | Optical system of an illumination device of a projection exposure apparatus | Karl-Heinz Schuster, Juergen Hartmaier, Dieter Schmerek, Detlev Mueller, Otto Hahnemann +3 more | 2011-11-29 |
| 8025427 | Filter device for the compensation of an asymmetric pupil illumination | Damian Fiolka | 2011-09-27 |
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Vladimir Davydenko, Axel Scholz, Markus Deguenther, Johannes Wangler | 2011-08-23 |
| 7995280 | Projection exposure system, beam delivery system and method of generating a beam of light | Matthias Kuss, Damian Fiolka, Gerd Reisinger, Vladimir Davydenko | 2011-08-09 |
| 7911584 | Illumination system for microlithography | Wolfgang Singer, Joachim Wietzorrek, Joachim Hainz, Gabriele Weirauch | 2011-03-22 |
| 7875865 | EUV illumination system with a system for measuring fluctuations of the light source | Axel Scholz, Markus Weiss, Philipp Bosselmann | 2011-01-25 |