Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7911584 | Illumination system for microlithography | Wolfgang Singer, Joachim Hainz, Gabriele Weirauch, Manfred Maul | 2011-03-22 |
| 7906767 | Excitation and imaging optics for fluorescence detection | Alan Furlan | 2011-03-15 |