Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Vladimir Davydenko, Axel Scholz, Johannes Wangler | 2011-08-23 |
| 7969556 | Illumination optical system for microlithography and illumination system and projection exposure system with an illumination optical system of this type | — | 2011-06-28 |