Issued Patents 2011
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Vladimir Davydenko, Markus Deguenther, Johannes Wangler | 2011-08-23 |
| 7940375 | Transmission filter apparatus | Damian Fiolka | 2011-05-10 |
| 7880969 | Optical integrator for an illumination system of a microlithographic projection exposure apparatus | Oliver Wolf, Heiko Siekmann, Eva Kalchbrenner, Siegfried Rennon, Johannes Wangler +6 more | 2011-02-01 |
| 7875865 | EUV illumination system with a system for measuring fluctuations of the light source | Markus Weiss, Manfred Maul, Philipp Bosselmann | 2011-01-25 |