Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8004656 | Illumination system for a microlithographic projection exposure apparatus | Damian Fiolka, Manfred Maul, Axel Scholz, Markus Deguenther, Johannes Wangler | 2011-08-23 |
| 7995280 | Projection exposure system, beam delivery system and method of generating a beam of light | Matthias Kuss, Damian Fiolka, Gerd Reisinger, Manfred Maul | 2011-08-09 |