Issued Patents 2011
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7977651 | Illumination system particularly for microlithography | Hans-Juergen Mann, Wolfgang Singer, Joerg Schultz, Johannes Wangler, Karl-Heinz Schuster +2 more | 2011-07-12 |
| 7910900 | Collector for an illumination system | Ralf Stuetzle | 2011-03-22 |
| RE42118 | Projection system for EUV lithography | Russell Hudyma, Hans-Jurgen Mann | 2011-02-08 |