Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7884303 | Laser thin film poly-silicon annealing optical system | William N. Partlo, Palash P. Das, Michael Thomas | 2011-02-08 |
| RE42118 | Projection system for EUV lithography | Hans-Jurgen Mann, Udo Dinger | 2011-02-08 |